Conquering Heat Issues In e-beam Lithography

Where we’ve been, where we are now, and where we’re going.


By Noriaki Nakayamada

What’s the best way to deal with the menacing heating effects in VSB mask writing? The answer lies in part on leveraging GPU acceleration. Check out this video on what’s ahead for multi-beam mask writing.

—Noriaki Nakayamada is group manager at NuFlare Technology.