By Ed Sperling
Semiconductor Manufacturing & Design sat down with Mark Bohr, senior fellow at Intel, to talk about a wide range of manufacturing and design issues Intel is wrestling with at advanced nodes—and just how far the road map now extends.
SMD: Will EUV make 10nm? And if it doesn’t, what effect will that have on Intel?
Bohr: For a process module as critical as lithography... » read more