Advanced Defect Inspection Techniques For nFET And pFET Defectivity At 7nm Gate Poly Removal Process


By Ian Tolle, GlobalFoundries, and Michael Daino, KLA-Tencor During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain are not sufficiently protected, the etch can damage the active region and render the FET inoperative. Different materials are used in t... » read more

Electromagnetic Analysis and Signoff: Cost Savings


By Nikolas Provatas and Magdy Abadir We are often asked by SoC design teams about the benefits of an electromagnetic analysis and signoff methodology. Here is an overview of some of the big “cost savings”. Time to Market Savings Utilizing an EM crosstalk analysis and signoff methodology provides designers with an “insurance policy” against the risk of EM coupling in their SOC des... » read more

Survey: EUV Optimism Grows


The confidence level remains high for extreme ultraviolet (EUV) lithography, although the timing of the insertion remains a moving target, according to a new survey released by the eBeam Initiative. At the same time, the outlook for the overall photomask industry is bullish, according to the survey. On the downside, however, there appears to be no progress in terms of improving mask turnaro... » read more

Designers Face Growing Problems With On-Chip Power Distribution


The technology evolution in semiconductor manufacturing has led to chips with ever-higher power densities, which is leading to serious problems with on-chip power distribution. Specifically, the problems surrounding voltage drop—or IR drop (from V=IxR)—have become so acute that we have seen multiple companies starting to get back dead silicon from the fab. For example, a recent 7nm chip ... » read more

Process Corner Explosion


The number of corners that need to be checked is exploding at 7nm and below, fueled by everything from temperature and voltage to changes in metal. Lowering risk and increasing predictability of an SoC at those nodes starts with understanding what will happen when a design is manufactured on a particular foundry process, captured in process corners. This is basically a way of modeling what i... » read more

The Quest For Perfection


Demands by automakers for zero defects over 15 years are absurd, particularly when it comes to 10/7nm AI systems that will be the brains of autonomous and assisted driving or any mobile electronic device. There are several reasons for this. To begin with, no one has ever used a 10/7nm device under extreme conditions for any length of time. Chips developed at these nodes are just starting to ... » read more

Week In Review: Manufacturing, Test


Chipmakers GlobalFoundries said that it is putting its 7nm finFET program on hold indefinitely and has dropped plans to pursue technology nodes beyond 7nm. To be sure, it was a tough decision by GF to put 7nm on hold. But generally, analysts believe that GF made the right decision. “There’s only a handful of semiconductor companies that will require high-volume 7nm technology right when... » read more

GF Puts 7nm On Hold


GlobalFoundries is putting its 7nm finFET program on hold indefinitely and has dropped plans to pursue technology nodes beyond 7nm. The moves, which mark a major shift in direction for the foundry, involve a headcount reduction of about 5% of its worldwide workforce. At the same time, the company is also moving its ASIC business into a new subsidiary. As a result of GlobalFoundries’ ann... » read more

Where FD-SOI Works Best


Semiconductor Engineering sat down to discuss changes in the FD-SOI world and what's behind them, with James Lamb, deputy CTO for advanced semiconductor manufacturing and corporate technical fellow at Brewer Science; Giorgio Cesana, director of technical marketing at STMicroelectronics; Olivier Vatel, senior vice president and CTO at Screen Semiconductor Solutions; and Carlos Mazure, CTO at Soi... » read more

Chip Aging Becomes Design Problem


Chip aging is a growing problem at advanced nodes, but so far most design teams have not had to deal with it. That will change significantly as new reliability requirements roll out across markets such as automotive, which require a complete analysis of factors that affect aging. Understanding the underlying physics is critical, because it can lead to unexpected results and vulnerabilities. ... » read more

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