CD-SAXS makes progress
For years, chipmakers have used metrology tools based on various optical techniques, such as scatterometry.
But optical-based scatterometry may one day run out of steam, prompting the need for a possible replacement. One long-awaited candidate is called X-ray scattering. There are various flavors of X-ray scattering, including CD small-angle X-ray scattering (CD-SAXS)... » read more