DSA, Multi-beam Make Steady Progress

Semiconductor Engineering sat down to discuss current and future lithography challenges with Laurent Pain, lithography lab manager at CEA-Leti. What follows are excerpts of that conversation. SE: CEA-Leti has two major programs in lithography. One is in directed self-assembly (DSA) and the other is in multi-beam e-beam. Let’s start with multi-beam. What is Leti doing in multi-beam and what... » read more

Waiting for Porous Low-k

I'm working on a longer article on low-k dielectric integration, but in the meantime I wanted to pass along an observation from Joubert Olivier of LTM-CNRS, in his presentation at the Materials Research Society Spring Meeting. Asked about the prospects for low-k integration, he reminded the audience that even if an integration scheme is able to achieve good selectivity between the hard mask ... » read more