Rule Deck Comparison Doesn’t Have To Be Difficult


Foundry rule decks change all the time, as foundries uncover new manufacturing issues, or the process changes, or design criteria are tightened to improve runtime or stability. Sometimes new versions of a user’s design rule checking (DRC) tool are released, and the results from the DRC run differ from the previous version. Or perhaps a company wants to compare results between rule decks from ... » read more

Deployment of OASIS In The Semiconductor Industry


The OASIS working group was first initiated in 2001, published the new format in March 2004, which was ratified as an official SEMI standard in September 2005. A follow-on initiative expanded the new standard to cover the needs of the mask manufacturing equipment sector with a derived standard called OASIS.MASK (P44) that was released in November 2005 and updated in May 2008. While there are ma... » read more