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KLA

Group/Division

With over 40 years of semiconductor process control experience, chipmakers around the globe rely on KLA to ensure that their fabs ramp next-generation devices to volume production quickly and cost-effectively. Enabling the movement towards advanced chip design, KLA’s Global Products Group (GPG), which is responsible for creating all of KLA’s metrology and inspection products, is looking for the best and the brightest research scientist, software engineers, application development engineers, and senior product technology process engineers.

The Broadband Plasma Division (BBP) provides market-leading patterned wafer optical inspection systems for leading-edge IC manufacturing. Logic, foundry, and memory customers depend on BBP products to detect yield-critical defects for process debug and excursion monitoring at advanced process nodes.

BBP flagship products include the 29xx and 39xx series which leverage Broadband Plasma technology to capture a wide range of defects with ultimate sensitivity at the optical inspection speeds needed for inline defect monitoring.

Responsibilities

The Research Scientist will be responsible for designing and conducting feasibility investigations to provide valuable guidance for KLA’s roadmap in optical inspection of patterned wafers. The advent of devices having 5 nm and smaller design rules with complex three dimensional structures, using advanced processes and materials, presents a particularly challenging goal of maintaining high-speed inspection and classification of wafer-pattern defects that are much smaller than the wavelength of light used to inspect the wafer.  The Research Scientist will work within a technology group to identify, investigate, and develop promising new concepts, methods and subsystems that could be used to meet these challenges. Specifically, the Research Scientist will work with Customers, Marketing and Applications Engineers to assess future inspection requirements and acquire relevant wafer samples for tests. The Research Scientist will then define and complete experiments and analysis to determine relevant methods and technologies for development. The analysis and experiments include electro-magnetic simulations and operation of optical imaging systems along with analysis of resulting data. The Research Scientist would then present results and recommendations to the product teams and to customers.

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