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Onto Innovation

Metrology, defect inspection, lithography, and smart manufacturing software.


Onto Innovation provides a range of metrology, defect inspection, and lithography systems as well as smart manufacturing and yield management software for semiconductor manufacturing.

Onto was formed from the merger of Nanometrics Incorporated and Rudolph Technologies in 2019. Nanometrics, founded in 1975, provided optical metrology and inspection products. Rudolph Technologies, founded in 1940, made a range of equipment for measurement and inspection.

  • HQ: Wilmington, Mass., U.S.
  • Founded: 2019
  • Founded by: Merger of Nanometrics Incorporated and Rudolph Technologies
  • Website:
  • Type: Company


Yield Tracking In RDL


Total Overlay With Multiple RDLs