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Luminescent Technologies

Computational metrology and inspection


Luminescent Technologies supplied products to the semiconductor industry that enabled precise on-wafer pattern fidelity, large process windows and short time to silicon for accelerated yield ramps, superior design tolerance and favorable IC economics. The Company’s computational lithography and defect management solutions, based upon Inverse Lithography Technology (ILT) used mathematical methods and software algorithms to rigorously solve for the optimal semiconductor lithography and inspection processes.