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Provides immersion lithography and EUV systems.


ASML is a provider of immersion lithography and EUV systems as well as metrology tools.
The company was founded in 1984 as a joint venture between Philips and Advanced Semiconductor Materials International (ASMI).

In 1988, ASMI withdrew from the ASML joint venture and was bought out by Philips.

In 1995, ASML launched an initial public offering on the Amsterdam and NASDAQ stock exchanges.

In 2000, acquired Silicon Valley Group (SVG), making it the largest lithography tool vendor, in an all-stock transaction valued at $1.6 billion.

In March 2007, ASML acquired Brion Technologies, Inc., a provider of computational lithography, including design verification, reticle enhancement technologies and optical proximity correction, for $270 million in cash.

In May 2013, ASML acquired Cymer, a supplier of supplier of deep ultraviolet light sources, for 1.95 billion euros ($2.5 billion) in shares and cash.

In November 2016, ASML acquired Hermes Microvision, Inc. (HMI), a supplier of pattern verification systems. ASML will acquire all outstanding shares of HMI in a cash transaction valued at about TWD 100 billion ($3.1 billion).

Also in 2016, ASML acquired a 24.9% minority stake in optics supplier Carl Zeiss SMT for 1 billion euros ($1.1 billion) in cash.

  • HQ: Veldhoven, The Netherlands
  • Known for: lithography, EUV, immersion lithography,
  • Web: URL
  • Other names: ASML Holding, ASM Lithography
  • Type: Company