Ben Tsai

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Ben Tsai is CTO and executive vice president for corporate alliances at KLA. Tsai is responsible for spearheading KLA’s technology roadmap, strategic technology sourcing, corporate alliances and venture investments. In over 20 years at KLA, he has held a wide range of technology and leadership positions, including serving as VP and general manager of the wafer inspection division. In 1994 he was named CTO. He was previously SVP of technology at Tokyo Electron Limited. He holds approximately 50 patents in areas of inspection and metrology. Tsai received his bachelor’s degree in electrical engineering from the National Taiwan University, and his master’s degree and doctorate in electrical engineering from the University of Illinois at Urbana-Champaign.

Author's Latest Posts

Engineers’ Experiences Around The World

By Ben Tsai - 07 Dec, 2021 - Comments: 0

As CTO, I see my role partially as strengthening the engineering community through program reviews, engineering education programs, conferences, seminars, and the product life cycle process at KLA. I also think it is critically important to spark engineering enthusiasm – helping engineers rediscover the excitement and curiosity that helps drive innovation. When inspired to create, engineers c... » read more

Extreme Quality Semiconductor Manufacturing

By Ben Tsai - 11 Feb, 2020 - Comments: 0

By Ben Tsai and Cathy Perry Sullivan Across the full range of semiconductor device types and design nodes, there is a drive to produce chips with significantly higher quality. Automotive, IoT and other industrial applications require chips that achieve very high reliability over a long period of time, and some of these chips must maintain reliable performance while operating in an environmen... » read more