Advanced Defect Inspection Techniques For nFET And pFET Defectivity At 7nm Gate Poly Removal Process


By Ian Tolle, GlobalFoundries, and Michael Daino, KLA-Tencor During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain are not sufficiently protected, the etch can damage the active region and render the FET inoperative. Different materials are used in t... » read more

Week In Review: Manufacturing, Test


Chipmakers GlobalFoundries said that it is putting its 7nm finFET program on hold indefinitely and has dropped plans to pursue technology nodes beyond 7nm. To be sure, it was a tough decision by GF to put 7nm on hold. But generally, analysts believe that GF made the right decision. “There’s only a handful of semiconductor companies that will require high-volume 7nm technology right when... » read more

Week In Review: Design, Low Power


Synopsys unveiled a new formal app, Regression Mode Accelerator, which uses machine learning algorithms to speed up formal property verification, as well as better convergence of formal proofs for subsequent runs. According to Synopsys, the app also allows for significant saving of compute resources in nightly regressions. Hitachi used OneSpin Solutions' 360 EC product family to verify vCOSS... » read more

GF Puts 7nm On Hold


GlobalFoundries is putting its 7nm finFET program on hold indefinitely and has dropped plans to pursue technology nodes beyond 7nm. The moves, which mark a major shift in direction for the foundry, involve a headcount reduction of about 5% of its worldwide workforce. At the same time, the company is also moving its ASIC business into a new subsidiary. As a result of GlobalFoundries’ ann... » read more

Memory Startups To Watch


The next-generation memories are finally ramping up after years’ of delays and promises. Intel, for one, is shipping 3D XPoint, a next-generation technology based on phase-change memory. In addition, the big foundries are readying embedded MRAM. And, of course, there are a number of other players in the next-generation memory arena. There are also a number of startups that are flying un... » read more

Optimizing 5G With AI At The Edge


AI touches our lives in many different ways, and while some AI-enabled applications are highly visible, like the increasingly popular Amazon Echo and Google Home voice-controlled intelligent digital assistants, others are less obvious. But by no means are they less important. For example, AI techniques are essential to the successful rollout of 5G wireless communications. 5G is the develop... » read more

Next-Gen Memory Ramping Up


The next-generation memory market is heating up as vendors ramp a number of new technologies, but there are some challenges in bringing these products into the mainstream. For years, the industry has been working on a variety of memory technologies, including carbon nanotube RAM, FRAM, MRAM, phase-change memory and ReRAM. Some are shipping, while others are in R&D. Each memory type is di... » read more

Blog Review: Aug. 15


Cadence's Paul McLellan checks out what's driving the growth of China's semiconductor industry plus the state of fab construction, from a CAPSA presentation by SEMI's Lung Chu. Mentor's Joe Hupcey III has some tips for how to handle inconclusive results in formal verification, starting with how to identify where the analysis got stuck. Synopsys' Taylor Armerding listens in on a presentati... » read more

Mixed Outlook For Semi Biz


Both the IC and fab equipment industries have been enjoying a boom cycle for some time, but they could be facing speed bumps and possibly turbulence in the second half of this year and into 2019. In the first half of 2018, the industry was fueled by the momentum carried over from 2017. DRAM prices remained relatively high, which contributed to the revenue growth in the overall IC industry. M... » read more

Everything You Need to Know about FDSOI Technology


Over the past decades, transistor feature size has continuously decreased, leading to an increase in performance and a reduction in power consumption. Consumers have reaped the benefits, with superior electronic devices that have become increasingly useful, valuable, faster and more efficient. In recent years, as transistor feature size has shrunk below 10nm, it has become progressively more di... » read more

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