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Effect Of RF Plasma Process Gas Chemistry And Electrode Configuration On The Removal Of Copper Lead Frame Oxidation

By Daniel Chir and Johnson Toh Lead frame surface oxidation can lead to surface delamination after molding or wire bonding issues. The application of plasma treatment has been proven to be safe and effective solution to address these issues. However, the effectiveness of plasma treatment for removing oxide is dependent on the correct use of recipe parameters, gas chemistry and electrode conf... » read more