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Multivariate Analysis For Full Process Visibility

In semiconductor manufacturing, especially in electrical test data, but also in other parameters, there are often sets of parameters that are very highly correlated. Even a change in the correlation of those parameters may indicate a problem. For that reason, multivariate monitoring, or multivariate statistics, is applied to these parameters. Multivariate analysis, also known as multivariate... » read more

Preventing Process Excursion With AI And Yield Management Software

Process excursion, or any deviation in a certain process, significantly impacts the cost of semiconductor manufacturing process and product yield. During production, process excursion can be detected early during in-line inspections. However, in some cases, excursion isn’t detected until later in the production process such as during wafer testing in the probing area after production. Apar... » read more