Is Maskless Lithography Coming Into Its Own?


Lithographers have always faced tradeoffs between speed and flexibility. Steppers are very good at printing hundreds or thousands of identical features onto hundreds or thousands of wafers. They are not especially good at handling surfaces with significant topography, though. Nor is customization feasible. Every exposure uses the same reticle. Direct write e-beam lithography has long been us... » read more

Managing Water Supplies With Machine Learning


From wet benches to cooling systems, fabs use vast amounts of water — millions of gallons per day at a typical foundry. In this era of climate change, though, water supplies are becoming less reliable and municipal water systems are becoming more restrictive. For example, local utilities might restrict a fab’s ability to draw from the public water supply, or might supply only treated wastew... » read more

ReRAMs Look To Silicon For Silicon Compatibility


For such a critical material, silicon oxide is not especially well understood. The semiconductor industry certainly understands how to grow high quality oxides with high breakdown voltages, but what happens in less ideal situations? What does the introduction of microstructure do? If there are regions that are oxygen-rich or silicon-rich relative to the stoichiometric SiO2 composition, how do t... » read more

Big Shifts At Very Small Geometries


The number of changes across the semiconductor industry are accelerating and widening. There are more innovations, in more places, and in more applications. What follows is a small peek at just how many significant changes are afoot, where they are happening, and who's getting recognized for their efforts. Quantum computing, but hold the math The modern electronics industry rests on multip... » read more

Looking Forward To SPIE, And Beyond


On the eve of this year’s SPIE Advanced Lithography + Patterning conference, I took a look at the IEEE Devices and Systems Roadmap’s lithography section. It’s especially notable for the emergence of EUV lithography, which has quickly become critical for advanced logic. High-NA tools to support still smaller dimensions are on the horizon. In the near-term, though, the key challenge is not ... » read more

The Physics Of Ferroelectrics


The physics of ferroelectric materials is a large topic — too large for comprehensive coverage in a single article. While researching my recent article on negative capacitance, I found a number of papers that might be of interest to readers seeking more depth. Researchers in Japan used ferroelectric BiFeO3 to control the behavior of CaMnO3, a Mott insulator. Changing the polarization of th... » read more

What’s For Dinner?


Robots, as currently implemented, don’t do well in uncontrolled environments. In factories and warehouses, they are fenced off by yellow safety tape, doing highly repetitive and predictable tasks. When deployed to monitor parks and malls, they are easily thwarted by malicious humans and even unexpected landscape features. Yet robots able to assist elderly and disabled people will be genuin... » read more

Collaboration And Advanced Substrates


Discussions of semiconductor manufacturing tend to focus on CMOS logic and memory devices, sometimes to the exclusion of everything else. Discussions of silicon-on-insulator wafer markets focus on the needs of high performance logic. Lithography analysts emphasize high density memories. It’s easy to forget that real systems contain other devices, too. A modern smartphone probably supports ... » read more

Making Organic Semiconductors Plastic


Plastic. The very word implies deformability, the ability to bend and flex without damage in response to stress. In applications from biomedical sensors to solar cells, the potential advantages of organic semiconductors depend almost entirely on their deformability—are they flexible enough for inexpensive roll-to-roll processing? Able to tolerate flexion in use? Able to do without the bulky a... » read more

How The Brain Saves Energy By Doing Less


One of the arguments for neuromorphic computing is the efficiency of the human brain relative to conventional computers. By looking at how the brain works, this argument contends, we can design systems that accomplish more with less power. However, as Mireille Conrad and others at the University of Geneva pointed out in work presented at December's IEEE Electron Device Meeting, the brain... » read more

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