A look at what’s missing in semiconductor lithography and what’s needed to finish the job.
Multibeam’s David Lam looks at changes in semiconductor lithography, how CVD and etch improve pitch resolution that is not attainable using optical lithography, and how e-beam direct-write can finish the job.
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[…] In a video, David Lam, chairman of Multibeam, examines the following question, entitled “Can eBeam lithography ever get into mainstream manufacturing?” Lam talks about the changes taking place in lithography and other issues. […]