Development Of Capacitance Measurement Unit For A System Level Tester

By BeomSeok Kim, SeongHwan Kim, Unki Kim, SeongBeom Cho, DongHo Seo, and SangHun Yun In back-end semiconductor processing it is important to improve the performance of semiconductors due to the limitations of miniaturization in front-end processes. To achieve this goal, the industry continues to invest in back-end processing and competition is fierce in advanced technology of back-end proces... » read more