I’ve been talking about double patterning for a long time now in this series of blogs. I thought it might be good to start looking ahead at what is next for multi-patterning (Don’t Panic!). As you may have been hearing or reading, it doesn’t look like EUV lithography is going to be ready for 10nm, and may not even make it for 7nm. This means that alternative methods of extending the exist...
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