tag: wafer uniformity

Three Ways Curvy ILT Together With PLDC Improves Wafer Uniformity

By Aki Fujimura - 15 Apr, 2025 - Comments: 0

This is the second blog in a three-part series on pixel-level dose correction (PLDC). The first installment was “Improving Uniformity and Linearity for All Masks” from January 29, 2025. PLDC: A new solution for improving mask and wafer uniformity Improving mask uniformity is the easiest, cheapest way to improve wafer uniformity. Uniformity is a measure of how similarly the exact same feat... » read more

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