Virtual Exploration Of Novel Vertical DRAM Architectures


In this article, we demonstrate a pathfinding technique for a novel Vertical DRAM technology. First, we identify important process parameters (defined by current semiconductor production equipment capabilities) that strongly impact yield. By using a virtual model, we then perform experimental optimization of the Vertical DRAM device across specific target ranges, to help predict and improve the... » read more

Applying Machine Learning To Accelerate TCAD Calibration


TCAD models are the fundamental building blocks for the semiconductor industry. Whether it is a new process node or a new multi-billion dollar fab, accurate TCAD models must be developed and calibrated before they can be deployed in technology development. While TCAD models have been around for (many) decades, their complexity is growing exponentially, as is the demands placed on the R&D en... » read more

AI: Great, But Somehow Still Not Very Good


In an invited presentation at CS Mantech 2024, Charlie Parker, senior machine learning engineer at Tignis, provides context for the AI hype cycle with a high-level overview of machine learning concepts, then explores how the technology fits into the fab, from inventory management to institutional knowledge capture, but warns that it is worth being aware of the ways in which machine learning mod... » read more

Photoresist Materials Development


Toru Fujimori of FUJIFILM Corporation provides an overview of the development of photoresist materials for masks and wafers to support continued pattern shrinkage and address stochastic issues in lithography. » read more

Driving Generative AI Innovation: 5 Competitive Advantages For Taiwan In Enabling The Next Industrial Revolution


The developments in AI technology have been significant in recent years. In 2016, DeepMind AlphaGo’s victory over a human Go world champion was a significant milestone in the advancement of artificial intelligence (AI). Later in 2022, the emergence of ChatGPT 3.5 further strengthened the AI landscape. Generative AI has been a disruptive innovation, automating the creation of text, images... » read more

Package Assembly Design Kits: The Future Of Advanced Package Design


Why should there be an interest in Package Assembly Design Kits (PADK) today? For the most part, it is due to the advancement in the accumulation of files forming the PADK now offering a customized heterogeneous design experience that optimizes the device's intended package performance with complete connectivity verification, DRC, and assembly validation. Another primary reason is the ongoing f... » read more

Understanding CFETs, A Next Generation Transistor Architecture


Computing power has experienced exponential growth over the last 70 years. This has largely been achieved through transistor scaling. Due to a continuous reduction in the size of transistors, engineers have been able to pack more and more of them onto a single chip [1]. This has led to faster, more powerful, and more energy-efficient devices. Improvements in fabrication processes and materials,... » read more

Exploring The Fundamentals Of Photolithography


In the semiconductor materials industry, photolithography is a crucial technology for creating intricate electronic circuits. Essentially, it’s the art of printing at the nanoscale level, enabling the precise patterning of semiconductor materials. The ability to do this well is important for companies in the industry because it determines how detailed and efficient microchips can be. This aff... » read more

Navigating The Talent Crunch: AI Solutions For A Thriving Semiconductor Manufacturing Sector


The CHIPS and Science Act is a historic piece of legislation passed by the US government in 2022 aimed at regaining American leadership in semiconductor manufacturing. Supported by an unprecedented $52 billion in federal funding, this investment will also address supply chain vulnerabilities and national security concerns that were made glaringly public by the COVID epidemic. In addition to ... » read more

A Wrap-Up Of Photomask Japan 2024


This year, I had the opportunity to attend the 30th Symposium on Photomask and NGL Mask Technology, also called Photomask Japan 2024 (PMJ), in Yokohama, Japan, from April 16 to 18. This well-regarded symposium brings together engineers from all over the world to share ideas on photomasks, NGL masks and related technologies. It was great being back to an in-person conference after four years ... » read more

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