Compact synchrotron EUV sources
For some time, the industry has been exploring the development of next-generation power sources for extreme ultraviolet (EUV) lithography.
ASML and Gigaphoton are separately developing EUV sources based on the more traditional and compact laser-produced-plasma (LPP) technology.
Then, in R&D, others are exploring the development of futuristic EUV sources us...
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