Differences In The Lithographic Impact Of Particles On The Pellicle Surface Depending On Type Of EUV Mask Pattern


A new technical paper titled "Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern Types" was published by Hanyang University and Paul Scherrer Institute. Abstract "This study investigates the differences in the lithographic impact of particles on the pellicle surface depending on the type of extreme ultraviolet (EUV) mask pattern. Using a... » read more

October ’19 Startup Funding: Mega Harvest


Seventeen startups took in mega-rounds of $100 million or more during October, with a cumulative total of just over $3.2 billion. Cybersecurity startups continued to be popular with private investors during the month of October, with 15 financing rounds. Twenty automotive and mobility technology firms picked up new investments. Analytics firms, artificial intelligence/machine learning techno... » read more

The Week In Review: IoT


Finance Particle, the provider of a full-stack Internet of Things device platform for enterprises, has raised $20 million in Series B funding, bringing its total venture funding to $30 million. Spark Capital led the new round, with participation by Qualcomm Ventures and existing investors in the IoT startup. Machina Research estimates cellular IoT connections will increase from 334 million in ... » read more