Benchmarking Electron Holography And Pixelated STEM On Various Semiconductor Structures


A technical paper titled “Measuring electrical properties in semiconductor devices by pixelated STEM and off-axis electron holography (or convergent beams vs. plane waves).” was published by researchers at CEA-LETI at the Universite Grenoble Alpes and EPFL. Abstract: "We demonstrate the use of both pixelated differential phase contrast (DPC) scanning transmission electron microscopy (STEM... » read more

Navigating the Metrology Maze For GAA FETs


The chip industry is pushing the boundaries of innovation with the evolution of finFETs to gate-all-around (GAA) nanosheet transistors at the 3nm node and beyond, but it also is adding significant new metrology challenges. GAA represents a significant advancement in transistor architecture, where the gate material fully encompasses the nanosheet channel. This approach allows for the vertical... » read more

Power/Performance Bits: Mar. 20


Proton battery prototype A team at RMIT University built a prototype rechargeable proton battery combining hydrogen fuel cells and battery-based electrical power that has the potential, with further development, to store more energy than currently-available lithium ion batteries. The working prototype proton battery uses an activated carbon electrode for solid-state storage of hydrogen with... » read more