Authors: Shunsuke Abe, Hideo Hara, Shin Masuda, and Hirohito Yamada.
This paper describes a simple fabrication process of verticaltaper structures which can locally tune the thickness of silicon photonic devices. For low-loss spot-size conversion, taper angles less than 10° are required. To fabricate the gradual-slope shape of the vertical tapers, we have developed a step-andexposure lithog...
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