Counting And Controlling DSA Defects

If directed self-assembly is to succeed in semiconductor manufacturing, [gettech id="31046" t_name="DSA"] processes must achieve defect rates in line with the stringent requirements of sub-20nm device nodes. So far, they haven’t. However, it’s not yet clear whether the high defect rates represent a real obstacle, or are simply part of the development of any new, immature process technology... » read more