Assume Nothing: Clearing Up Common Misconceptions About Multi-Patterning

It’s all about what you don’t know regarding processes and their limitations.


Multi-patterning (MP) makes IC design and manufacture possible at advanced nodes, and Calibre Multi-Patterning technology automates the MP process. However, the complexity of MP and the potential costs of failure require a clear understanding of the process and its limitations. Even though MP has been used for several nodes, there are still some serious disconnects in industry expectations and assumptions about how MP decomposition and debugging work. Correcting the misconceptions surrounding layout decomposition is a necessary step in the effective and efficient use of Calibre Multi-Patterning technology.

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