Double Patterning Custom Design And Debug

How to avoid common mistakes in LELE.


Litho-Etch-Litho-Etch (LELE) double pattern (DP) processing affects many aspects of the design flow at/below the 20 nm node level. This can be very disruptive for the custom designer, impacting basic cell design strategy, layout rules and debug as well as parasitic extraction. This paper discusses how to deal with these impacts, avoid common design mistakes, and debug quickly and accurately.

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