Nova METRION Use Cases

Four high-value use cases that reduced scrap, saved money, and improved productivity for semiconductor manufacturers.


Several use cases that we will explore for the Nova METRION® system include contamination control, process excursion prevention, reactor matching, and uniformity control. The objectives of these use cases are to detect contaminants which can kill devices, improve barrier layer and source/drain function, maintain deposition uniformity that impacts downstream processes, and ensure wafer-to-wafer consistency.

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