Overview Of The Current State of the Development Of Curvilinear Masks

Why these new mask shapes are more reliable.

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A technical paper titled “Curvilinear masks overview: manufacturable mask shapes are more reliably manufacturable” was published by researchers at D2S.

The paper covers:

  • The rationale for curvilinear masks
  • The application of the curvilinear inverse lithography technology
  • The state of readiness of the curvilinear mask-making infrastructure, including mask rule checking, metrology, inspection, and repair
  • Studies demonstrating the reliability in manufacturing

Find the technical paper here.

Aki Fujimura, Yohan Choi, Abhishek Shendre, “Curvilinear masks overview: manufacturable mask shapes are more reliably manufacturable,” J. Micro/Nanopattern. Mats. Metro. 23(4) 041502 (24 August 2024) https://doi.org/10.1117/1.JMM.23.4.041502.



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