Why these new mask shapes are more reliable.
A technical paper titled “Curvilinear masks overview: manufacturable mask shapes are more reliably manufacturable” was published by researchers at D2S.
The paper covers:
Find the technical paper here.
Aki Fujimura, Yohan Choi, Abhishek Shendre, “Curvilinear masks overview: manufacturable mask shapes are more reliably manufacturable,” J. Micro/Nanopattern. Mats. Metro. 23(4) 041502 (24 August 2024) https://doi.org/10.1117/1.JMM.23.4.041502.
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