A new technical paper titled “Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry” was published by researchers at IMEC and KU Leuven.
“We present a site-specific elemental analysis of nano-scale patterns whereby the data acquisition is based on Rutherford backscattering spectrometry (RBS). The analysis builds on probing a large ensemble of identical nanostructures,” states the paper.
Find the technical paper here. Published Oct.2022.
Claessens, N., Khan, Z.Z., Haghighi, N.R. et al. Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry. Sci Rep 12, 17770 (2022). https://doi.org/10.1038/s41598-022-22645-8. Creative commons license.
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