Key Technologies To Extend EUV To 14 Angstroms


The top three foundries plan to implement high-NA EUV lithography as early as 2025 for the 18 angstrom generation, but the replacement of single exposure high-NA (0.55) over double patterning with standard EUV (NA = 0.33) depends on whether it provides better results at a reasonable cost per wafer. So far, 2024 has been a banner year for high-numerical aperture EUV lithography. Intel Foundry... » read more

Finding, Predicting EUV Stochastic Defects


Several vendors are rolling out next-generation inspection systems and software that locates problematic defects in chips caused by processes in extreme ultraviolet (EUV) lithography. Each defect detection technology involves various tradeoffs. But it’s imperative to use one or more of them in the fab. Ultimately, these so-called stochastic-induced defects caused by EUV can impact the perf... » read more

Week In Review: Auto, Security, Pervasive Computing


Automotive & transportation Chip shortages continue to affect automotive production lines and the bottom line of automotive OEMs. Jaguar Land Rover and Daimler this week said they will reduce production because chip supply issues. Other car companies have or are planning to temporarily shut down production lines. Renault, GM, Ford, Fiat Chrysler (now Stellantis), Volkswagen, Nissan, and Ho... » read more