7nm Lithography Choices

By Mark LaPedus - 07 Mar, 2016 - Comments: 2

Chipmakers are ramping up their 16nm/14nm logic processes, with 10nm expected to move into early production later this year. Barring a major breakthrough in lithography, chipmakers are using today’s 193nm immersion and multiple patterning for both 16/14nm and 10nm. Now, chipmakers are focusing on the lithography options for 7nm. For this, they hope to use a combination of two technologies ... » read more

Inside Multi-Beam E-Beam Lithography

By Mark LaPedus - 19 Nov, 2015 - Comments: 4

Semiconductor Engineering sat down with David Lam, chairman of Multibeam, a developer of multi-beam e-beam tools for direct-write lithography applications. Lam is also a venture capitalist. He founded Lam Research in 1980, but left as an employee in 1985. What follows are excerpts of that conversation. SE: How has the equipment business changed over the years and what’s the state of the i... » read more

Complementary E Beam Lithography

By eBeam Initiative - 19 Aug, 2015 - Comments: 0

Multibeam Chairman David Lam looks at complementary E-Beam lithography (CEBL) and the impact of 1D design and pitch division. [youtube vid=nyvplBl4HA4] » read more

Billions And Billions Invested

By Mark LaPedus - 17 Apr, 2014 - Comments: 4

Over the years, next-generation [getkc id="80" kc_name="lithography"] (NGL) has suffered various setbacks and delays. But until recently, the industry basically shrugged its shoulders and expressed relatively little anxiety about the NGL delays. After all, optical lithography was doing the job in the fab and NGL would eventually materialize. Today, however, the mood is different. In fact, th... » read more

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tag: complementary E-beam lithography

7nm Lithography Choices

Inside Multi-Beam E-Beam Lithography

Complementary E Beam Lithography

Billions And Billions Invested

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