Choosing The Right Illumination Design Software

As a decision maker responsible for making the right choices for your company’s bottom line, which optical design software should you choose? If the performance or cost of your illumination subsystem is critical to the success of your products, the answer is LightTools. LightTools will increase your engineering productivity, enable faster time to market, and provide your products the competit... » read more

Impact Of Illumination On Model-Based SRAF Placement For Contact Patterning

Sub-Resolution Assist Features (SRAFs) have been used extensively to improve the process latitude for isolated and semi-isolated features in conjunction with off-axis illumination. These SRAFs have typically been inserted based upon rules which assign a global SRAF size and proximity to target shapes. Additional rules govern the relationship of assist features to one another, and for random log... » read more