Epi SiGe Application Using METRION In-Line SIMS System


The epitaxial process is a well-established deposition technique in semiconductor fabrication because it enables the ability to achieve much higher doping concentrations than can be obtained via ion implantation. As we move toward <5nm technology, a key process for enabling gate-all-around FET (GAAFET) is the stacked multi-lattice of Silicon (Si) and Silicon-germanium (SiGe) epi process for ... » read more

Manufacturing Bits: Feb. 4


Non-targeted analysis Using a technology called machine learning, the Southwest Research Institute has introduced a software tool that detects known and unknown chemical components in food, air and drugs. It detects compounds in products we are exposed to every day using both machine learning and metrology techniques. A subset of artificial intelligence (AI), machine learning uses advanced ... » read more

Power/Performance Bits: Oct. 24


Molecular storage Chemists at the Institut Charles Sadron and Aix-Marseille University used mass spectrometry to read several bytes of data recorded on the molecular scale with synthetic polymers, setting a new benchmark for the amount of data stored as a sequence of molecular units (monomers) that can be read. Polymers have great potential since, to record a bit, their component monomers r... » read more