By Alessandro Vaglio Preta, Trey Gravesa, David Blankenshipa, Kunlun Baib, Stewart Robertsona, Peter De Bisschopc, John J. Biaforea
a) KLA-Tencor Corporation, Austin, TX 78759, U.S.A.
b) KLA-Tencor Corporation, Milpitas, CA 95035, U.S.A.
c) IMEC, Kapeldreef 75, 3000, BE
ABSTRACT
Stochastics effects are the ultimate limiter of optical lithography technology and are a major concern for n...
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