Progress report on EUV resists
The development of resists is a key part of extreme ultraviolet (EUV) lithography.
“EUV resists are production ready,” said Kevin Cummings, Sematech’s director of lithography. “However, through Sematech’s work with the resist suppliers, we have observed a deceleration in the rate of improvements. As a result, Sematech is working not only with the re...
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