By David Lammers
Intel’s decision to invest as much as $4.1 billion in ASML has raised overall confidence levels in EUV lithography, and should allow the Dutch lithography vendor to funnel more funds into the stubbornly difficult effort to raise the EUV source power.
ASML has said it needs to reach 250 Watts of average source power to achieve the 125 wph throughputs sought by its early cu...
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