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2018 eBeam Initiative Perceptions Survey Results

Confidence in EUV and multi-beam remains high in annual perceptions survey.

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EUV confidence and multi-beam remains high in the 7th Annual Perceptions Survey – 2018 (July). EUV perceptions remain positive. 82% of respondents predict EUV in HVM by end of 2021. Only 1% predict EUV will never happen. Confidence is high again for EUV lithography in high-volume manufacturing and expectations continue to grow around actinic mask inspection for EUV.

Perceptions on the need for MBMW grow. Belief that EUV adoption requires MBMW grew and perceived need for MBMW increased for 193i and NIL as well. Confidence remains high for MBMW in high-volume manufacturing

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