Case Study – Semiconductor Auto Multi Sensor

A sensor designed for maximize uptime and optimize maintenance of test chambers.


CyberOptics’ WaferSense sensor, Auto Multi Sensor (AMS), combines an Auto Leveling Sensor (ALS), Auto Vibration Sensor (AVS), and a humidity sensor in a thin, light, all-in-one multi sensor. The ALS and AVS have well-established records of success for their ease-of-use, robust performance and convenient form factor. The addition of the humidity sensing (to tilt and vibration) in the AMS lets engineers also check for air leaks in the chamber and evaluate the efficiency of dry air purging procedures.

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Author: Yukinobu Hayashi, Sr. Field Applications Engineer, CyberOptics

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