What’s Up With MEMS?


New sensor technologies, and smarter ways of integrating more intelligence, continue to generate unexpected opportunities in the changing MEMS business. Changes needed for sensors for context awareness If digital assistants are ever going to be really useful, they’ll need some particular sensor capabilities to understand emotion, suggests Lama Nachman, head of Intel’s Anticipatory Compu... » read more

Controlling Uniformity At The Edge


Chipmakers want every part of the wafer to produce, or yield, good die. Advances in process technologies over the years have just about made this a reality, even as feature dimensions continue to shrink and devices grow ever more complex. Now, the last frontier is improving yields at the edge of the wafer – the outer 10 mm or so – where chemical, physical, and even thermal discontinuitie... » read more

Reducing BEOL Parasitic Capacitance Using Air Gaps


Reducing back-end-of-line (BEOL) interconnect parasitic capacitance remains a focus for advanced technology node development. Porous low-k dielectric materials have been used to achieve reduced capacitance, however, these materials remain fragile and prone to reliability concerns. More recently, air gap has been successfully incorporated into 14nm technology [1], and numerous schemes have been ... » read more

5 Takeaways From SEMI’s SMC


At the recent Strategic Materials Conference (SMC), there were a multitude of presentations on a number of subjects. The event, sponsored by SEMI, had presentations on the IC industry, market drivers, electronic materials and other subjects. In no particular order, here are my five takeaways from SMC: Materials M&A mania Last year, the IC industry experienced a dizzying array of merger ... » read more

Fab Equipment Spending Sets New Record


Fab equipment spending (new and refurbished) is expected to increase by 37% for 2017, reaching a new annual spending record of about $55 billion. The World Fab Forecast also forecasts that in 2018, fab equipment spending will increase even more, another 5%, for a record high of about $58 billion. The last record spending was in 2011 with about $40 billion. The spending in 2017 is now expected t... » read more

Using Advanced Statistical Analysis To Improve FinFET Transistor Performance


Trial and error wafer fabrication is commonly used to study the effect of process changes in the development of FinFET and other advanced semiconductor technologies. Due to the interaction of upstream unit process parameters (such as deposition conformality, etch anisotropy, selectivity) during actual fabrication, variations based upon process changes can be highly complex. Process simulators t... » read more

Big Push For 3D Sensing With iPhone X


3D sensing is a buzzword that has been thrown around quite a bit this year in connection with the rumors surrounding the tenth-anniversary iPhone. Although the iPhone X will be the first large-scale consumer push for 3D sensing, the technology has been around for years, particularly in industrial applications such as machine vision. 3D sensing is already used in the PC – think Intel’s RealS... » read more

Getting Ready For EUV


The highly anticipated introduction of extreme ultra-violet (EUV) lithography is reflected in recent surveys conducted by the eBeam Initiative, which will be presented on Sept. 11 at the annual Photomask Technology Symposium in Monterey, Calif.  There are many changes are coming to the mask industry, in addition to EUV. Those include greater use of inverse-lithography technologies (ILT) and... » read more

Silicon Wafers: M&A, Price Hikes


Chipmakers need to keep a close eye on the silicon wafer industry, as the business continues to undergo a number of changes. On one front, the silicon wafer industry continues to consolidate. Then, after years of suffering from an oversupply and falling prices, many silicon wafer vendors are experiencing tight supply and have begun to raise prices. Silicon wafers are a fundamental part of... » read more

Silicon Photonics: Solving Process Variation And Manufacturing Challenges


As silicon photonics manufacturing gains momentum with additional foundry and 300mm offerings, process variation issues are coming to light. Variability in silicon processing affects the waveguide shape and can result in deviation in effective indices, propagation loss, and coupling efficiency from the intended design. In this article, we will highlight process variation issues that can occur i... » read more

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