GPU Acceleration for Pixel-based Computing in Various Mask Processing and Verification Steps

O(p) approach for GPU acceleration for accurate and practical data processing for curvy masks.

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A technical paper titled “Leaping into the curvy world with GPU accelerated O(p) computing” was published by researchers at D2S, Inc.

The papers discusses the advantages of using GPU acceleration for pixel-based computing during various mask processing and verification steps.  It found that the O(p) approach for GPU acceleration is effective in handling data processing for curvy masks.

Find the paper here.

Citation:
Abhishek Shendre and Aki Fujimura “Leaping into the curvy world with GPU accelerated O(p) computing”, Proc. SPIE 12751, Photomask Technology 2023, 1275108 (21 November 2023); https://doi.org/10.1117/12.2689299



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