MEMS Capacitance Extraction With Calibre xACT-3D Software

Achieving accurate node-to-node capacitance values with minimal computational resources.


The growing use of MEMS in today’s complex products requires new approaches to capacitance calculation to ensure companies can meet their time-to-market targets while producing products that meet performance and reliability expectations. Freescale Semiconductor and Mentor Graphics collaborated to demonstrate that Calibre xACT-3D software provides a robust method for extracting node-to-node capacitance values for MEMS devices with field-solver level accuracy, while requiring minimal computational resources.

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