A micro X-ray (micro-XRF) source and a wavelength dispersive spectrometer (WDS) will enhance the analytical capability of a SEM.
The accurate and precise analysis of steels and alloys is essential for understanding their mechanical and thermal properties. Such materials often have a wide range of elements at various concentrations down to trace ppm levels. Accordingly, it is not possible to determine the concentrations of all elements with a standard scanning electron microscope (SEM) and an energy dispersive spectrometer (EDS). Specifically, the analysis of steels and alloys is challenging due to:
Therefore, the addition of a micro X-ray (micro-XRF) source and a wavelength dispersive spectrometer (WDS) will enhance the analytical capability of the SEM to use the advantages of each component. In this application note the use of two excitation sources (electrons and X-rays) utilized in combination with two possible detectors (EDS or WDS) will be discussed.
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