Legacy Tools, New Tricks: Optical 3D Inspection


Stacking chips is making it far more difficult to find existing and latent defects, and to check for things like die shift, leftover particles from other processes, co-planarity of bumps, and adhesion of different materials such as dielectrics. There are several main problems: Not everything is visible from a single angle, particularly when vertical structures are used; Various struc... » read more

Super-Resolution Microscopy


The enhanced resolving power of super-resolution microscope technology enables the imaging and quantitative analysis of cellular dynamics and nanostructures that were previously inaccessible. Download this eBook to learn about: Principles and advantages of super-resolution microscopy (SRM) for life sciences research. Problems solved by SRM Common approaches to achieving be... » read more

Bump Co-Planarity And Inconsistencies Cause Yield, Reliability Issues


Bumps are a key component in many advanced packages, but at nanoscale levels making sure all those bumps have a consistent height is an increasing challenge. Without co-planarity, surfaces may not properly adhere. That can reduce yield if the problem is not identified in packaging, or it can cause reliability problems in the field. Identifying those issues requires a variety of process steps... » read more

Quantification Of Steels And Alloys Using A Dual Source Multidetector System On SEM


The accurate and precise analysis of steels and alloys is essential for understanding their mechanical and thermal properties. Such materials often have a wide range of elements at various concentrations down to trace ppm levels. Accordingly, it is not possible to determine the concentrations of all elements with a standard scanning electron microscope (SEM) and an energy dispersive spectromete... » read more

Enabling Test Strategies For 2.5D, 3D Stacked ICs


Improved testability, coupled with more tests at more insertion points, are emerging as key strategies for creating reliable, heterogeneous 2.5D and 3D designs with sufficient yield.  Many changes need to fall into place to make side-by-side 2.5D and 3D stacking approaches cost-effective, particularly for companies looking to integrate chiplets from different vendors. Today, nearly all of t... » read more

Deep Learning To Classify And Establish Structure Property Predictions With PeakForce QNM Atomic Force Microscopy


Machine learning and specifically, deep learning, is a powerful tool to establish the presence (or absence) of microstructure correlations to bulk properties with its ability to flesh out relationships and trends that are difficult to establish otherwise. This application note discusses the use of deep learning tools, to explore AFM phase and PeakForce Quantitative Nanomechanics (QNM) im... » read more

Nanosheet FETs Drive Changes In Metrology And Inspection


In the Moore’s Law world, it has become a truism that smaller nodes lead to larger problems. As fabs turn to nanosheet transistors, it is becoming increasingly challenging to detect line-edge roughness and other defects due to the depths and opacities of these and other multi-layered structures. As a result, metrology is taking even more of a hybrid approach, with some well-known tools moving... » read more

Advantages Of Measuring Surface Roughness With White Light Interferometry


The concept of measuring surface roughness originated nearly a century ago as a means to prevent uncertainty and disputes between manufacturers and buyers. Now, it has become a common identifier used throughout industry for validating manufacturing processes, confirming adherence to both internal and regulatory specifications, and guaranteeing quality and performance of end products. Subjective... » read more

Week In Review: Auto, Security, Pervasive Computing


Automotive, mobility The head of Tesla’s Autopilot division — Andrej Karpathy — resigned from the company after Tesla laid off 200 people in its Autopilot division and the U.S. National Highway Transportation Safety Administration broadened its safety investigation of Tesla’s Autopilot. The NHTSA last month broadened its August 2021 investigation, which was looking at why Tesla cars on... » read more

Week In Review: Auto, Security, Pervasive Computing


Automotive, mobility U.S. National Highway Traffic Safety Administration (NHTSA) release its first crash reports from ADAS (advanced driver assistance systems, i.e., SAE Level 2) and ADS (automated driving systems, i.e., SAE Levels 3-5).  The systems had to be in use at least 30 seconds before the crash in order for it to be reportable. The car may have had the system turned off at the time ... » read more

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