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Improving Machine Learning-Based Modeling of Semiconductor Devices by Data Self-Augmentation


Abstract: "In the electronics industry, introducing Machine Learning (ML)-based techniques can enhance Technology Computer-Aided Design (TCAD) methods. However, the performance of ML models is highly dependent on their training datasets. Particularly in the semiconductor industry, given the fact that the fabrication process of semiconductor devices is complicated and expensive, it is of grea... » read more