Important Process Parameter And Its Sensitivity Check By Virtual Fabrication: Channel Hole Profile Impact On Advanced 3D NAND Structure


A virtual DOE-based process sensitivity check was performed for two tiers of channel holes in a 3D NAND device. The channel hole tilt distance, twist angle, and their sensitivities to the visible area in silicon-oxide-nitride-oxide (SONO) punch process were analyzed. The results show that controlling the upper tilt distance is more important for offering a larger visible area. Also, a negative ... » read more

Transforming Semiconductor Manufacturing: How AI And ML Boost Productivity And Beat The Skill Shortage


In the fast-paced world of semiconductor manufacturing, where innovation and efficiency are essential, there is a serious challenge – the persistent skilled labor shortage. As evident by billboards looking for workers along major highways, this shortage is not just a concern but a pressing reality. Semiconductor manufacturers in the United States face a multifaceted problem—tightened... » read more

Reducing Greenhouse Gases In Manufacturing


Businesses must reduce their environmental impact. One of the most significant ways to do this is by reducing their carbon footprint, and this starts with monitoring carbon emissions. Carbon emissions are responsible for 81% of overall greenhouse gas (GHG) emissions, and businesses are responsible for a lot of it. The rest of the GHG emissions are methane (10%), nitrous oxide (7%) and fluorin... » read more

CEO Outlook: Chip Industry 2022


Semiconductor Engineering sat down to discuss broad industry changes and how that affects chip design with Anirudh Devgan, president and CEO of Cadence; Joseph Sawicki, executive vice president of Siemens EDA; Niels Faché, vice president and general manager at Keysight; Simon Segars, advisor at Arm; and Aki Fujimura, chairman and CEO of D2S. This discussion was held in front of a live audience... » read more

The Industrial Revolution Is Over


One of the greatest impacts of the industrial revolution was that better communication allowed for greater specialization, and with that came better economics. There have been multiple waves of the industrial revolution, each triggered by some improvement in communications. The first wave was all about trains — raw materials and finished goods could be quickly and cheaply moved between cit... » read more

Who Designs Medical ICs


The medical chip market is heating up as sensor and processing technologies reach maturity, seeing off a frenzy of activity by systems companies and startups looking to plant a stake in a vast and largely untapped arena. As with any industry, there are a variety of business models, which can spread out the design burden over many companies or just one large one. This was limited in the past ... » read more

Big Payback For Combining Different Types Of Fab Data


Collecting and combining diverse data types from different manufacturing processes can play a significant role in improving semiconductor yield, quality, and reliability, but making that happen requires integrating deep domain expertise from various different process steps and sifting through huge volumes of data scattered across a global supply chain. The semiconductor manufacturing IC data... » read more

Global Fab Equipment Spending Poised To Log Three Straight Years Of Record Highs


Fueled by surging pandemic-inspired demand for electronics devices, the global semiconductor industry is on track to register a rare three consecutive years of record highs in fab equipment spending with a 16% increase in 2020 followed by forecast gains of 15.5% this year and 12% in 2022, SEMI highlighted in its quarterly World Fab Forecast report. Fabs worldwide will add about $10 billion ... » read more

Applications, Challenges For Using AI In Fabs


Experts at the Table: Semiconductor Engineering sat down to discuss chip scaling, transistors, new architectures, and packaging with Jerry Chen, head of global business development for manufacturing & industrials at Nvidia; David Fried, vice president of computational products at Lam Research; Mark Shirey, vice president of marketing and applications at KLA; and Aki Fujimura, CEO of D2S. Wh... » read more

Untangling 3D NAND: Tilt, Registration, And Misalignment


The multiple demands of 3D NAND to enable yield and performance increase in difficulty at each generation. First generation devices, at 24-32 layer pairs, pushed process tools to extremes, going quickly from 10:1 to 40:1 aspect ratios for today’s 64-96 pair single tier devices. The aspect ratios increased as fast as the manufacturing challenges. To continue bit density scaling, processing imp... » read more

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