Manufacturing Bits: March 2


Next-gen AFM At the recent SPIE Advanced Lithography conference, Imec, Infinitesima and others described a new metrology tool technology called a Rapid Probe Microscope (RPM). Infinitesima has shipped its first RPM 3D system, enabling three-dimensional (3D) metrology applications for leading-edge chips. The system was jointly developed with Imec. In the IEDM paper, Imec and Infinitesima... » read more

Manufacturing Bits: March 24


Autonomous microscopes FLEET, also known as the ARC Centre of Excellence in Future Low-Energy Electronics Technologies, has developed an autonomous scanning probe microscopy (SPM) technology. SPM is an instrument that makes use of an atomically sharp probe. The probe is placed in close proximity above the surface of a sample. With the probe, the SPM forms images of the surface of the sample... » read more

Manufacturing Bits: Nov. 5


Nanoliter measurements The National Institute of Standards and Technology (NIST) has developed an optofluidic measurement system that can measure the flow of liquids at the nanoliter scale. Targeted for the field of microfluidics, the system can measure the flow of liquids as small as 10 billionths of a liter per minute. A nanoliter (nL) is one billionth of a liter. A liter is 33.814 ounces... » read more

Quantum Effects At 7/5nm And Beyond


Quantum effects are becoming more pronounced at the most advanced nodes, causing unusual and sometimes unexpected changes in how electronic devices and signals behave. Quantum effects typically occur well behind the curtain for most of the chip industry, baked into a set of design rules developed from foundry data that most companies never see. This explains why foundries and manufacturing e... » read more