By Mark LaPedus
Semiconductor Manufacturing & Design sat down to discuss future lithography challenges with Serge Tedesco, lithography program manager at CEA-Leti; Laurent Pain, lithography lab manager at CEA-Leti; and Raluca Tiron, a senior scientist at CEA-Leti.
SMD: CEA-Leti has two major and separate programs, including one in directed self-assembly (DSA) and another in multi-beam ...
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