Current Characterization Of Various Cu RDL Designs In Wafer Level Packages (WLP)

By JeongMin Ju - 15 Aug, 2024 - Comments: 0

Copper (Cu) redistribution layer (RDL) technology is used to interconnect chips in various high current Wafer Level Packaging (WLP) applications. Typically, Cu RDLs with thicknesses of 5-9 µm and widths of 5-20 µm are used for high current sourcing. In this case, the temperature of the Cu RDL metal line increases due to the Joule heat generated when current passes through the metal line. If a... » read more

Electromigration Performance Of Fine-Line Cu Redistribution Layer (RDL) For HDFO Packaging

By JiHye Kwon - 18 Jan, 2024 - Comments: 1

The downsizing trend of devices gives rise to continuous demands of increasing input/output (I/O) and circuit density, and these needs encourage the development of a High-Density Fan-Out (HDFO) package with fine copper (Cu) redistribution layer (RDL). For mobile and networking application with high performance, HDFO is an emerging solution because aggressive design rules can be applied to HDFO ... » read more

The Glass Substrate Question: When Will It Replace Copper Clad Laminate?

By Keith Best - 12 Sep, 2023 - Comments: 0

"When will glass replace copper clad laminate on advanced IC substrates?" That’s a question many on the heterogeneous integration (HI) side of the semiconductor industry are asking. Unfortunately, the answer is not straightforward. But before we get to answering that, let’s take an advanced IC substrate (AICS) refresher. In other words, how did we get to the point where glass substrat... » read more

Addressing Total Overlay Drift In Advanced IC Substrate (AICS) Packaging

By Keith Best - 07 Mar, 2023 - Comments: 0

For years, many in the semiconductor industry have focused on the march toward advanced nodes. As these nodes have decreased in size, the size of input/output (I/O) bumps on the chip has grown smaller. As these bumps shrink, their ability to mate directly to printed circuit boards (PCB) diminishes, which, in turn, leads to the need for an intermediary substrate. Enter the advanced IC substrate ... » read more

Heterogeneous Integration: Correcting Overlay Errors On Advanced Integrated Circuit Substrates (AICS)

By John Chang - 08 Nov, 2022 - Comments: 0

By John Chang, with Corey Shay, James Webb, and Timothy Chang For high-performance computing, artificial intelligence, and data centers, the path ahead is certain, but with it comes a change in substrate format and processing requirements. Instead of relying on the quest for the next technology node to bring about future device performance gains, manufacturers are charting a future based inc... » read more

Heterogeneous Integration: Exposing Large Panels With Fewer Shots

By John Chang - 11 Oct, 2022 - Comments: 0

By John Chang, with Corey Shay, James Webb, and Timothy Chang The More than Moore era is upon us, as manufacturers increasingly turn to back-end advances to meet the next-generation device performance gains of today and tomorrow. In the advanced packaging space, heterogeneous integration is one tool helping accomplish these gains by combining multiple silicon nodes and designs inside one pac... » read more

Making Chip Packaging More Reliable

By Mark LaPedus - 15 Apr, 2021 - Comments: 0

Packaging houses are readying the next wave of IC packages, but these products must prove to be reliable before they are incorporated into systems. These packages involve several advanced technologies, such as 2.5D/3D, chiplets and fan-out, but vendors also are working on new versions of more mature package types, like wirebond and leadframe technologies. As with previous products, packaging... » read more

Fan-Out Wafer-Level Packaging And Copper Electrodeposition

By Steven T. Mayer - 21 May, 2020 - Comments: 0

By Steven T. Mayer, Bryan Buckalew, and Kari Thorkelsson As integrated circuit designers bring more sophisticated chip functionality into smaller spaces, heterogeneous integration, including 3D stacking of devices, becomes an increasingly useful and cost-effective way of mixing and connecting various functional technologies. One of the heterogeneous integration platforms gaining increased ac... » read more

Planning For Panel-Level Fan-out

By Mark LaPedus - 21 Nov, 2019 - Comments: 0

Several companies are developing or ramping up panel-level fan-out packaging as a way to reduce the cost of advanced packaging. Wafer-level fan-out is one of several advanced packaging types where a package can incorporate dies, MEMS and passives in an IC package. This approach has been in production for years, and is produced in a round wafer format in 200mm or 300mm wafer sizes. Fan-out... » read more

One Micron Damascene Redistribution for Fan-Out Wafer Level Packaging Using a Photosensitive Dielectric Material

By Veeco - 22 May, 2019 - Comments: 0

Authors: Warren W. Flack, Robert Hsieh, Ha-Ai Nguyen Ultratech, a division of Veeco 3050 Zanker Road, San Jose, CA 95134 USA [email protected] John Slabbekoorn, Samuel Suhard, Andy Miller IMEC Kapeldreef 75 B-3001 Leuven, Belgium [email protected] Akito Hiro, Romain Ridremont JSR MICRO NV Technologielaan 8 B-3001 Leuven, Belgium [email protected] Abstract This... » read more

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