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Power/Performance Bits: Feb. 23


Photonic AI accelerator There are now many processors and accelerators focused on speeding up neural network performance, but researchers at the University of Münster, University of Oxford, Swiss Federal Institute of Technology Lausanne (EPFL), IBM Research Europe, and University of Exeter say AI processing could happen even faster with the use of photonic tensor processors that can handle mu... » read more

Overlay Control for Nanoimprint Lithography


Abstract:  Nanoimprint lithography (NIL) is a promising technique for fine-patterning with a lower cost than other lithography techniques such as EUV or immersion with multi-patterning. NIL has the potential of "single" patterning for both line patterns and hole patterns with a half-pitch of less than 20nm. NIL tools for semiconductor manufacturing employ die- by-die alignment syste... » read more

Overlay Control for Nanoimprint Lithography


Abstract: Nanoimprint lithography (NIL) is a promising technique for fine-patterning with a lower cost than other lithography techniques such as EUV or immersion with multi-patterning. NIL has the potential of "single" patterning for both line patterns and hole patterns with a half-pitch of less than 20nm. NIL tools for semiconductor manufacturing employ die- by-die alignment system ... » read more